Patents by Inventor Roger Sorum

Roger Sorum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlled gas supply line apparatus and process for infilm and onfilm defect reduction
    Patent number: 6814837
    Abstract: According to one aspect of the disclosure, the present invention provides methods and arrangements for controlling supply process gas to a process chamber for use in the manufacturing industry. Methods include controlling the operation of a valve coupled to the supply process gas line in a way such that pressure bursts in the process chamber due to the operation of the valve are reduced, or even eliminated.
    Type: Grant
    Filed: October 20, 1998
    Date of Patent: November 9, 2004
    Assignee: Advance Micro Devices, Inc.
    Inventors: Kin-Sang Lam, Dennis C. Swartz, Roger Sorum