Patents by Inventor Roger Steele Cornell

Roger Steele Cornell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for equipment monitoring using a group candidate baseline and probabilistic model
    Patent number: 9915932
    Abstract: Systems and methods are provided for monitoring equipment in a semiconductor manufacturing facility. A processing device maintains baseline measurement record generated from measurements performed by a plurality of tools over a first time range. A measurement record is received, the measurement record corresponding to a measurement performed on a wafer, the wafer having been processed by a first tool of the plurality of tools. The measurement record is stored in a drift candidate table corresponding to a second time range. A determination is made as to whether the measurement record satisfy a set of excursion rules in view of the drift candidate table, and, in response to the determination, the measurement record is stored in an alert table.
    Type: Grant
    Filed: December 1, 2014
    Date of Patent: March 13, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Paul Alexander Llanos, Roger Steele Cornell
  • SYSTEM AND METHOD FOR EQUIPMENT MONITORING USING A GROUP CANDIDATE BASELINE AND PROBABILISTIC MODEL
    Publication number: 20160154395
    Abstract: Systems and methods are provided for monitoring equipment in a semiconductor manufacturing facility. A processing device maintains baseline measurement record generated from measurements performed by a plurality of tools over a first time range. A measurement record is received, the measurement record corresponding to a measurement performed on a wafer, the wafer having been processed by a first tool of the plurality of tools. The measurement record is stored in a drift candidate table corresponding to a second time range. A determination is made as to whether the measurement record satisfy a set of excursion rules in view of the drift candidate table, and, in response to the determination, the measurement record is stored in an alert table.
    Type: Application
    Filed: December 1, 2014
    Publication date: June 2, 2016
    Inventors: Paul Alexander Llanos, Roger Steele Cornell