Patents by Inventor Roger Thomas Williams

Roger Thomas Williams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for electrically measuring insulating film thickness
    Patent number: 6570228
    Abstract: A method and an apparatus for measuring insulating film thickness, such as the width of sidewall spacers. The method includes positioning a first test structure having a first resistance at a first location on a semiconductor wafer and positioning a second test structure having a second resistance different from the first resistance at a second location on the semiconductor wafer. The method also includes measuring the first resistance of the first test structure and measuring the second resistance of the second test structure. The method also includes determining an average characteristic of the first test structure and the second test structure, other than resistance, based on the first resistance of the first test structure and the second resistance of the second test structure.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: May 27, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Mark Brandon Fuselier, Roger Thomas Williams, Michael Verne Fenske