Patents by Inventor Roger Tyldesley

Roger Tyldesley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sloped contact etch process
    Patent number: 4698128
    Abstract: A process described provides a sloped contact etch. The process has the steps of: etching a substrate then removing the polymer that is produced during the substrate etch. These two steps are alternated until a desired depth is reached. Next, the resist is etched followed by an etch of the substrate. This is then repeated until the required depth is reached. By varying the duration and repetition of the etches, the slope of the etch can be regulated.
    Type: Grant
    Filed: November 17, 1986
    Date of Patent: October 6, 1987
    Assignee: Motorola, Inc.
    Inventors: Robert K. Berglund, Karl E. Mautz, Roger Tyldesley