Patents by Inventor Roger W. Eagans

Roger W. Eagans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-parameter process and control method
    Patent number: 7619184
    Abstract: A method and system for generating control settings for a multi-parameter control system. The interdependencies of processing tools and the related effect on semiconductor wafers within a processing tool is factored into a mathematical model that considers desired and measured wafer quality parameters in the derivation of specific solutions of sets of possible quality parameter adjustments. A selection process determines a set of adjustments such as one that results in minimal changes to the process.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: November 17, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Sergey A. Velichko, Jeffrey S. Nelson, Roger W. Eagans
  • Multi-parameter process and control method
    Publication number: 20040173599
    Abstract: A method and system for generating control settings for a multi-parameter control system. The interdependencies of processing tools and the related effect on semiconductor wafers within a processing tool is factored into a mathematical model that considers desired and measured wafer quality parameters in the derivation of specific solutions of sets of possible quality parameter adjustments. A selection process determines a set of adjustments such as one that results in minimal changes to the process.
    Type: Application
    Filed: March 4, 2003
    Publication date: September 9, 2004
    Inventors: Sergey A. Velichko, Jeffrey S. Nelson, Roger W. Eagans