Patents by Inventor Roger W. Lindsay

Roger W. Lindsay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160225822
    Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures.
    Type: Application
    Filed: April 11, 2016
    Publication date: August 4, 2016
    Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
  • Patent number: 9362300
    Abstract: Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: June 7, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Roger W. Lindsay, Akira Goda, John Hopkins
  • Patent number: 9318430
    Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures.
    Type: Grant
    Filed: January 22, 2015
    Date of Patent: April 19, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
  • Publication number: 20160104717
    Abstract: Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
    Type: Application
    Filed: October 8, 2014
    Publication date: April 14, 2016
    Inventors: Zhenyu Lu, Roger W. Lindsay, Akira Goda, John Hopkins
  • Publication number: 20150129935
    Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures.
    Type: Application
    Filed: January 22, 2015
    Publication date: May 14, 2015
    Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
  • Publication number: 20150123189
    Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 7, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Jie Sun, Zhenyu Lu, Roger W. Lindsay, Brian Cleereman, John Hopkins, Hongbin Zhu, Fatma Arzum Simsek-Ege, Prasanna Srinivasan, Purnima Narayanan
  • Publication number: 20150123188
    Abstract: Methods for forming a string of memory cells, an apparatus having a string of memory cells, and a system are disclosed. A method for forming the string of memory cells comprises forming a metal silicide source material over a substrate. The metal silicide source material is doped. A vertical string of memory cells is formed over the metal silicide source material. A semiconductor material is formed vertically and adjacent to the vertical string of memory cells and coupled to the metal silicide source material.
    Type: Application
    Filed: November 1, 2013
    Publication date: May 7, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Zhenyu Lu, Roger W. Lindsay, Andrew Bicksler, Yongjun J. Hu, Haitao Liu
  • Publication number: 20150044860
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatuses that include them. In one such method, a silicide is formed in a tier of silicon, the silicide is removed, and a device is formed at least partially in a void that was occupied by the silicide. One such apparatus includes a tier of silicon with a void between tiers of dielectric material. Residual silicide is on the tier of silicon and/or on the tiers of dielectric material and a device is formed at least partially in the void. Additional embodiments are also described.
    Type: Application
    Filed: October 27, 2014
    Publication date: February 12, 2015
    Inventors: Anurag Jindal, Gowri Damarla, Roger W. Lindsay, Eric Blomiley
  • Patent number: 8945996
    Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: February 3, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
  • Patent number: 8872252
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatuses that include them. In one such method, a silicide is formed in a tier of silicon, the silicide is removed, and a device is formed at least partially in a void that was occupied by the silicide. One such apparatus includes a tier of silicon with a void between tiers of dielectric material. Residual silicide is on the tier of silicon and/or on the tiers of dielectric material and a device is formed at least partially in the void. Additional embodiments are also described.
    Type: Grant
    Filed: August 3, 2011
    Date of Patent: October 28, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Anurag Jindal, Gowri Damarla, Roger W. Lindsay, Eric Blomiley
  • Patent number: 8803228
    Abstract: A memory array includes a control gate, where every memory cell coupled to a first side of the control gate is within a first row of memory cells and every memory cell coupled to a second side of the control gate is within a second row of memory cells, and where the first row of memory cells is successively adjacent to the second row of memory cells. The memory array also includes alternating first and second bit lines, where each of the memory cells of the first row of memory cells is coupled to a respective one of the first bit lines, where each of the memory cells of the second row of memory cells is coupled to a respective one of the second bit lines, and wherein the first bit lines are different from the second bit lines.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: August 12, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Roger W. Lindsay, Lyle Jones
  • Publication number: 20140167131
    Abstract: A method to fabricate a three dimensional memory structure may include creating a stack of layers including a conductive source layer, a first insulating layer, a select gate source layer, and a second insulating layer, and an array stack. A hole through the stack of layers may then be created using the conductive source layer as a stop-etch layer. The source material may have an etch rate no faster than 33% as fast as an etch rate of the insulating material for the etch process used to create the hole. A pillar of semiconductor material may then fill the hole, so that the pillar of semiconductor material is in electrical contact with the conductive source layer.
    Type: Application
    Filed: December 17, 2012
    Publication date: June 19, 2014
    Inventors: Zhenyu Lu, Hongbin Zhu, Gordon A. Haller, Roger W. Lindsay, Andrew Bicksler, Brian J. Cleereman, Minsoo Lee
  • Publication number: 20130277731
    Abstract: Various embodiments include methods and apparatuses, such as memory cells formed on two or more stacked decks. A method includes forming a first deck with first levels of conductor material and first levels of dielectric material over a substrate. Each level of the conductor material is separated from an adjacent level of conductor material by at least one of the first levels of dielectric material. A first opening is formed through the first levels of conductor material and dielectric material. A sacrificial material is formed at least partially filling the first opening. A second deck is formed over the first deck. The second deck has second levels of conductor material and second levels of dielectric material with each level of the conductor material being separated from an adjacent level of conductor material by at least one of the second levels of dielectric material. Additional apparatuses and methods are disclosed.
    Type: Application
    Filed: April 18, 2012
    Publication date: October 24, 2013
    Inventors: Akira Goda, Roger W. Lindsay
  • Patent number: 8399347
    Abstract: Integrated circuits and methods for forming conductive lines and conductive pads of integrated circuits are disclosed. One such integrated circuit includes circuitry, a first conductor coupled to the circuitry, a conductive pad coupled to the first conductor, and a second conductor spaced apart from the first conductor and coupled to the conductive pad. The second conductor would be floating but for its coupling to the conductive pad.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: March 19, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Roger W Lindsay
  • Publication number: 20130032870
    Abstract: Methods of forming multi-tiered semiconductor devices are described, along with apparatuses that include them. In one such method, a silicide is formed in a tier of silicon, the silicide is removed, and a device is formed at least partially in a void that was occupied by the silicide. One such apparatus includes a tier of silicon with a void between tiers of dielectric material. Residual silicide is on the tier of silicon and/or on the tiers of dielectric material and a device is formed at least partially in the void. Additional embodiments are also described.
    Type: Application
    Filed: August 3, 2011
    Publication date: February 7, 2013
    Inventors: Anurag Jindal, Gowri Damarla, Roger W. Lindsay, Eric Blomiley
  • Patent number: 8369150
    Abstract: A relaxed metal pitch architecture may include a bit line and a first active area string and a second active area string. The bit line may be directly coupled to the first active area string and to the second active area string. The relaxed metal pitch architecture may be applied to a non-volatile memory structure.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: February 5, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Lyle D. Jones, Roger W. Lindsay, Kirk D. Prall
  • Publication number: 20120261722
    Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The stack has a primary portion and an end portion. At least some of the features extend farther in the horizontal direction in the end portion moving deeper into the stack in the end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Horizontally elongated openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend from the primary portion into the end portion, and individually laterally about sides of vertically extending portions of both the operative structures and the dummy structures.
    Type: Application
    Filed: April 12, 2011
    Publication date: October 18, 2012
    Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
  • Publication number: 20120127793
    Abstract: A memory array includes a control gate, where every memory cell coupled to a first side of the control gate is within a first row of memory cells and every memory cell coupled to a second side of the control gate is within a second row of memory cells, and where the first row of memory cells is successively adjacent to the second row of memory cells. The memory array also includes alternating first and second bit lines, where each of the memory cells of the first row of memory cells is coupled to a respective one of the first bit lines, where each of the memory cells of the second row of memory cells is coupled to a respective one of the second bit lines, and wherein the first bit lines are different from the second bit lines.
    Type: Application
    Filed: January 27, 2012
    Publication date: May 24, 2012
    Inventors: Roger W. Lindsay, Lyle Jones
  • Publication number: 20120043661
    Abstract: Integrated circuits and methods for forming conductive lines and conductive pads of integrated circuits are disclosed. One such integrated circuit includes circuitry, a first conductor coupled to the circuitry, a conductive pad coupled to the first conductor, and a second conductor spaced apart from the first conductor and coupled to the conductive pad. The second conductor would be floating but for its coupling to the conductive pad.
    Type: Application
    Filed: August 23, 2010
    Publication date: February 23, 2012
    Inventor: Roger W. Lindsay
  • Patent number: 8114737
    Abstract: Methods of fabricating memory are disclosed. For example, a method includes fabricating rows of memory cells on pillars separated by isolation regions therebetween. Each pillar has a pair of memory cells, each on an opposite side thereof. The method also includes fabricating control gates substantially between the rows of memory cells, each control gate to control half the cells of each of its adjacent rows of memory cells, and fabricating word lines for the array, the word lines extending substantially parallel to the control gates for the cells.
    Type: Grant
    Filed: October 15, 2009
    Date of Patent: February 14, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Roger W. Lindsay, Lyle Jones