Patents by Inventor Rohan Gosain

Rohan Gosain has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Defect sampling for electron beam review based on defect attributes from optical inspection and optical review
    Patent number: 9535010
    Abstract: Various embodiments for generating a defect sample for electron beam review are provided. One method includes combining, on a defect-by-defect basis, one or more first attributes for defects determined by optical inspection of a wafer on which the defects were detected with one or more second attributes for the defects determined by optical review of the wafer thereby generating combined attributes for the defects. The method also includes separating the defects into bins based on the combined attributes for the defects. The bins correspond to different defect classifications. In addition, the method includes sampling one or more of the defects for the electron beam review based on the bins into which the defects have been separated thereby generating a defect review sample for the electron beam review.
    Type: Grant
    Filed: May 11, 2015
    Date of Patent: January 3, 2017
    Assignee: KLA-Tencor Corp.
    Inventors: Rohan Gosain, Somit Joshi
  • Defect Sampling for Electron Beam Review Based on Defect Attributes from Optical Inspection and Optical Review
    Publication number: 20150330912
    Abstract: Various embodiments for generating a defect sample for electron beam review are provided. One method includes combining, on a defect-by-defect basis, one or more first attributes for defects determined by optical inspection of a wafer on which the defects were detected with one or more second attributes for the defects determined by optical review of the wafer thereby generating combined attributes for the defects. The method also includes separating the defects into bins based on the combined attributes for the defects. The bins correspond to different defect classifications. In addition, the method includes sampling one or more of the defects for the electron beam review based on the bins into which the defects have been separated thereby generating a defect review sample for the electron beam review.
    Type: Application
    Filed: May 11, 2015
    Publication date: November 19, 2015
    Inventors: Rohan Gosain, Somit Joshi