Patents by Inventor Rohini MISHRA

Rohini MISHRA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOVEABLE EDGE RINGS FOR SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20220328290
    Abstract: A substrate support includes an outer edge ring configured to be raised and lowered relative to the substrate support via one or more lift pins. The outer edge ring is further configured to interface with a guide feature extending upward from a middle ring of the substrate support. An inner edge ring is located radially inward of the outer edge ring and is configured to be raised and lowered, independently of the outer edge ring, relative to the substrate support via one or more lift pins.
    Type: Application
    Filed: August 7, 2020
    Publication date: October 13, 2022
    Inventors: Rohini MISHRA, Saravanapriyan SRIRAMAN