Patents by Inventor Roland Loos

Roland Loos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber
    Patent number: 7506609
    Abstract: In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave beam and a plasma localization unit generating a magnetic field are provided such that the magnetic field and the microwave beam intersect each other in the process chamber. The microwaves are uncoupled onto a concave reflection structure from the focal point thereof so that the microwave beam generated is essentially parallel. An arrangement for generating a magnetic field is movable along the microwave beam axis so that a cross volume between the microwave beam and the magnetic field can be moved along the beam axis whereby the conditions for electron cyclotron resonance are adjustable by displacement of the magnetic field.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: March 24, 2009
    Assignee: Forschungszentrum Karlsruhe GmbH
    Inventors: Sven Ulrich, Michael Stüber, Harald Leiste, Lorenz Niederberger, Konrad Sell, Martina Lattemann, Roland Loos
  • System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber
    Publication number: 20040255867
    Abstract: In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave beam and a plasma localization unit generating a magnetic field are provided such that the magnetic field and the microwave beam intersect each other in the process chamber. The microwaves are uncoupled onto a concave reflection structure from the focal point thereof so that the microwave beam generated is essentially parallel. An arrangement for generating a magnetic field is movable along the microwave beam axis so that a cross volume between the microwave beam and the magnetic field can be moved along the beam axis whereby the conditions for electron cyclotron resonance are adjustable by displacement of the magnetic field.
    Type: Application
    Filed: May 17, 2004
    Publication date: December 23, 2004
    Inventors: Sven Ulrich, Michael Stuber, Harald Leiste, Lorenz Niederberger, Konrad Sell, Martina Lattemann, Roland Loos