Abstract: Embodiments of the present disclosure are directed towards systems and apparatuses for delivery of thermal transfer fluid to and/or from a thermal head of thermal test equipment and for driving the thermal head and associated techniques. In one embodiment, a fluid delivery assembly includes a chamber assembly having an inlet channel and outlet channel for a thermal transfer fluid, and a piston assembly having an inlet channel and outlet channel for the thermal transfer fluid, the inlet channel of the piston assembly configured to route the thermal transfer fluid from the inlet channel of the chamber assembly and the outlet channel of the piston assembly configured to route the thermal transfer fluid to the outlet channel of the chamber assembly and a thermal head coupled with the piston assembly and configured to thermally couple with a device under test (DUT). Other embodiments may be described and/or claimed.