Abstract: A microscope, especially a microscope that is used for inspection in semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for the purpose of illumination, preferably in the UV range. At least one rotating diffusion disk is disposed downstream of the laser so as to homogenize the illumination. Preferably, two rotating diffusion disks of opposite rotational sense are disposed in the illumination beam path either directly or indirectly one behind the other.

Abstract: An arrangement for direct input coupling of a laser, preferably of a short-pulse laser, for nonlinear sample excitation which is located outside of the microscope housing, into the beam path of a laser scanning microscope (LSM), comprising a housing in which is integrated an adjusting laser that can be coupled into the microscope beam path by beam splitters, wherein the housing is advantageously integrated so as to be insertable in the scan module of the LSMA, and a beam splitter for the direct coupling laser has high transmission in the direction of the objective and, further, partial transmission for back-reflections of the adjusting laser coming from the specimen for adjusting the overlapping of the adjusting laser and direct coupling laser.

Abstract: A microscope, especially a microscope that is used for inspection in semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for the purpose of illumination, preferably in the UV range. At least one rotating diffusion disk is disposed downstream of the laser so as to homogenize the illumination. Preferably, two rotating diffusion disks of opposite rotational sense are disposed in the illumination beam path either directly or indirectly one behind the other.