Patents by Inventor Rolando Mendez

Rolando Mendez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber
    Patent number: 8580044
    Abstract: A system and method for semiconductor processing chamber includes a housing that can cover an annular gap of a pedestal well of the semiconductor processing chamber. A cleaning nozzle is removably coupled to a compressed dry air (CDA) supply. The cleaning nozzle can inject the CDA into the pedestal well while the housing can contain a byproduct dust agitated by the injected CDA. The byproduct dust is evacuated by at least one vacuum port that is removably coupled to a vacuum source.
    Type: Grant
    Filed: August 13, 2010
    Date of Patent: November 12, 2013
    Assignees: Samsung Austin Semiconductor, L.P., Samsung Electronics Co., Ltd.
    Inventors: Eric McCormick, Rolando Mendez, Bradley May
  • Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber
    Publication number: 20120037188
    Abstract: A system and method for semiconductor processing chamber includes a housing that can cover an annular gap of a pedestal well of the semiconductor processing chamber. A cleaning nozzle is removably coupled to a compressed dry air (CDA) supply. The cleaning nozzle can inject the CDA into the pedestal well while the housing can contain a byproduct dust agitated by the injected CDA. The byproduct dust is evacuated by at least one vacuum port that is removably coupled to a vacuum source.
    Type: Application
    Filed: August 13, 2010
    Publication date: February 16, 2012
    Applicant: Samsung Austin Semiconductor, LP
    Inventors: Eric McCormick, Rolando Mendez, Bradley May