Patents by Inventor Rolf Adolf Guenther

Rolf Adolf Guenther has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for etching transistor gates using a hardmask
    Patent number: 5851926
    Abstract: An etchant composition of nitrogen trifluoride and chlorine, preferably also including a passivation material such as hydrogen bromide, etches tungsten silicide-polysilicon gate layers with high selectivity to a thin underlying silicon oxide gate oxide layer to form straight wall, perpendicular profiles with low microloading and excellent profile control.
    Type: Grant
    Filed: October 1, 1996
    Date of Patent: December 22, 1998
    Assignee: Applied Materials, Inc
    Inventors: Ajay Kumar, Jeffrey Chinn, Shashank C. Deshmukh, Weinan Jiang, Rolf Adolf Guenther, Bruce Minaee, Mark Wiltse