Abstract: The invention relates to an apparatus for producing a plasma and treating substrates therein. The plasma produced by means of microwaves serves to coat a substrate which is situated in a chamber (5) having metal walls (6,7,12,13). The microwaves are repeatedly reflected at the metal walls (6,7,12,13), so that the chamber (5) has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber (5) or outside the chamber (5) in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber (5) an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.

Abstract: The plasma produced by means of microwaves in the presence of a magnetic field and a gas serves to coat a substrate which is situated in a chamber having metal walls. The microwaves are repeatedly reflected at the metal walls, so that the chamber has numerous microwave modes. By means of permanent magnets, which are placed either inside the chamber or outside the chamber in the vicinity of the substrate that is to be coated, it is possible to produce within this chamber an electron-cyclotron resonance which permits a locally controlled ignition of the plasma.

Abstract: A microwave plasma method/of depositing a coating of a prescribed material on the internal surface of a pipe by means of a reaction of a vapor phase providing a prescribed material in which:(a) an atmosphere at a pressure less than atmospheric pressure containing the vapor phase is introduced into the pipe,(b) microwave energy is beamed into the pipe which is propagated along the length of the inside of the pipe,(c) a magnetic field is generated in a localized area of the pipe in which electron cyclotron resonance occurs for the the frequency of the microwaves, and in which, pressure, field strength of the magnetic field and the power of the high-frequency field are selected that a low-pressure gas discharge results in the area of the magnetic field to trigger the reaction furnishing the prescribed material, and(d) in which the magnetic field and thus the plasma are transposed along the length of the pipe.

Abstract: A fluid-tight coupling device for microwave radiation of high energy incls a tubular dielectric window which is sealingly connected to one end of a waveguide supplying the microwave radiation and forms a continuation of the waveguide. The other end of the tube forming the window is tightly sealed by an essentially conical reflector. The tube forming the window is surrounded on the outside by a cup-shaped waveguide portion. The reflecting surface of the reflector and the reflecting inner surface of the cup-shaped waveguide portion are formed such that the microwave radiation emerging from the waveguide is reflected through the tubular window into the cup-shaped waveguide portion and from the latter to the open end of the waveguide portion in such a manner that an input mode of type TE.sub.mn is transformed into itself or a well-defined adjacent mode TE.sub.m'n', further secondary modes are minimized and at the same time return waves are also minimized.

Abstract: A microwave absorber with a microwave-absorbing material, a protective hong surrounding this, and a waveguide leading into the protective housing, through which waveguide the microwaves to be absorbed can be conducted to the absorbing material, the microwave-absorbing material forming a solid body with a hollow, on one side of which the waveguide opens, a termination element being arranged on the side of the hollow opposite to the waveguide, and the housing being provided with an inlet and an outlet for a cooling fluid.

Abstract: A microwave calorimeter for very high power, with a housing, which surrou a feed chamber, into which a waveguide runs for feeding the microwaves, and an absorber-chamber which is separated from the feed chamber by a dielectric wall and contains a microwave-absorbing fluid, the fluid consisting at least in part of a compound whose capacity for the absorption of microwaves is less than that of water.