Abstract: The present invention provides a sensor that can be operated at high temperatures. The sensor comprises a first electrode, a second electrode, and an aluminum nitride film which lies between the first and second electrode. The sensor can be used to measure pressure, acceleration, or force at high temperatures.

Abstract: The present invention provides a sensor that can be operated at high temperatures. The sensor comprises a first electrode, a second electrode, and an aluminum nitride film which lies between the first and second electrode. The sensor can be used to measure pressure, acceleration, or force at high temperatures.

Abstract: An ultrasonic transducer is provided comprising a transducer housing, a piezoelectric assembly, and a seating assembly. The transducer housing includes a front end, a rear end opposite the front end, and an ultrasonic window positioned at the front end. The piezoelectric assembly is positioned within the transducer housing and comprises a piezoelectric assembly substrate and a piezoelectric laminate formed over a front surface of the assembly substrate. The seating assembly is arranged to secure the piezoelectric assembly within the transducer housing such that at least a portion of the piezoelectric laminate is aligned with the ultrasonic window. The transducer housing, the assembly substrate, and the seating assembly are preferably constructed of high temperature and high pressure materials characterized by substantially equivalent coefficients of thermal expansion.