Patents by Inventor Roman Windpassinger

Roman Windpassinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for coupling laser beams
    Patent number: 7408714
    Abstract: In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: August 5, 2008
    Assignee: Coherent, Inc.
    Inventors: Roman Windpassinger, Frank Simon
  • Method for analysis of objects in microlithography
    Publication number: 20060269117
    Abstract: A method for analysis of an object in microlithography. The steps of the method include providing an aerial image measurement system (AIMS) that consists of at least two imaging steps; detecting the image output of the AIMS; and employing a correction filter to correct the detected image with respect to the transfer behavior of the second or other imaging steps. An AIMS apparatus to carry out the method is also defined.
    Type: Application
    Filed: July 3, 2004
    Publication date: November 30, 2006
    Inventors: Holger Seitz, Roman Windpassinger
  • Method and apparatus for coupling laser beams
    Publication number: 20060182155
    Abstract: In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.
    Type: Application
    Filed: February 9, 2006
    Publication date: August 17, 2006
    Inventors: Roman Windpassinger, Frank Simon