Abstract: Single-shot, adaptive metrology of rotationally variant optical surfaces, such as toroids, off-axis conies and freeform surfaces. An adaptive interferometric null test uses a high definition liquid crystal phase-only spatial light modulator (SLM) as the reconfigurable null element, on which a simulated nulling phase function is encoded, based on the specifications of the surface under test to generate a null interferogram. The power component of the surface sag is nulled by system design, not the SLM, enabling the SLM to fully compensate the residual departure without the need to tilt the optic or use a custom Offner-null. By wrapping the phase function at multiples of 2*pi radian, the upper limit in sag of the optic under test is theoretically removed.

Abstract: Optical coherence tomography metrology systems with two highly telecentric objective lenses wherein one or both telecentric objectives can be arranged in a pseudo-bistatic configuration. One featured telecentric objective has a large scanning field of view relevant for broadband laser scanning applications where low uncertainty measurements are desired. Another featured telecentric objective has a large image space NA relevant as a standalone microscope objective or as a probing objective for optical coordinate measurement machines.

Abstract: Single-shot, adaptive metrology of rotationally variant optical surfaces, such as toroids, off-axis conies and freeform surfaces. An adaptive interferometric null test uses a high definition liquid crystal phase-only spatial light modulator (SLM) as the reconfigurable null element, on which a simulated nulling phase function is encoded, based on the specifications of the surface under test to generate a null interferogram. The power component of the surface sag is nulled by system design, not the SLM, enabling the SLM to fully compensate the residual departure without the need to tilt the optic or use a custom Offner-null. By wrapping the phase function at multiples of 2*pi radian, the upper limit in sag of the optic under test is theoretically removed.

Abstract: Optical coherence tomography metrology systems with two highly telecentric objective lenses wherein one or both telecentric objectives can be arranged in a pseudo-bistatic configuration. One featured telecentric objective has a large scanning field of view relevant for broadband laser scanning applications where low uncertainty measurements are desired. Another featured telecentric objective has a large image space NA relevant as a standalone microscope objective or as a probing objective for optical coordinate measurement machines.