Patents by Inventor Romony K. San

Romony K. San has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for predicting oxygen-induced stacking fault density in wafers
    Patent number: 6798526
    Abstract: Methods and apparatus for predicting the density of oxygen-induced stacking faults (OSF) on a surface of a wafer by measuring the surface roughness before and after a surface damaging process is presented. Such damage can be produced by, but not limited to, a wet sand blast (WSB) process, a dry sand blast (DSB) process, lapping with an abrasive material, surface grinding, and by laser irradiation. The surface roughness resulting from the surface damage is quantified and compared with the pre-damaged surface roughness. The difference between the pre- and post-damaged surface roughness is determined and correlated with oxygen-induced stacking fault density to surface roughness correlation data to obtain the predicted oxygen-induced stacking fault density.
    Type: Grant
    Filed: September 12, 2002
    Date of Patent: September 28, 2004
    Assignee: SEH America, Inc.
    Inventors: Timothy L. Brown, Dorothy E. Goff, Romony K. San
  • Methods and apparatus for predicting oxygen-induced stacking fault density in wafers
    Publication number: 20040051882
    Abstract: Methods and apparatus for predicting the density of oxygen-induced stacking faults (OSF) on a surface of a wafer by measuring the surface roughness before and after a surface damaging process is presented. Such damage can be produced by, but not limited to, a wet sand blast (WSB) process, a dry sand blast (DSB) process, lapping with an abrasive material, surface grinding, and by laser irradiation. The surface roughness resulting from the surface damage is quantified and compared with the pre-damaged surface roughness. The difference between the pre- and post-damaged surface roughness is determined and correlated with oxygen-induced stacking fault density to surface roughness correlation data to obtain the predicted oxygen-induced stacking fault density.
    Type: Application
    Filed: September 12, 2002
    Publication date: March 18, 2004
    Inventors: Timothy L. Brown, Dorothy E. Goff, Romony K. San