Patents by Inventor Romulo D. Casallo, Jr.

Romulo D. Casallo, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7326025
    Abstract: Disclosed herein is a warp detection system (200) for determining warping in a carrier (110) configured to carry substrates (120) for processing. In one embodiment, the system (200) includes a guide plate (210) configured to guide a path of the carrier (110) during the processing, where the guide plate (210) is positioned underneath the carrier (110). In addition, the system (220) includes a plurality of sensors (230) positioned within the guide plate (210), wherein each of the plurality of sensors (230) is configured to measure a distance of a respective area of the carrier (110) from the guide plate (210). Also in this embodiment, the system (200) includes a processing device (310) configured to receive the measured distances and determine warping in the carrier (110) based on differences between the measured distances.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: February 5, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Ramil A. Viluan, Raymond M. Partosa, Romulo D. Casallo, Jr., Melvin B. Alviar