Patents by Inventor Ron S. Serisky

Ron S. Serisky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN-VACUUM PROTECTIVE LINERS
    Publication number: 20090179158
    Abstract: This device has a liner disposed on a face in a vacuum chamber. A component in the vacuum chamber defines the face. The liner is configured to protect the workpiece from contamination or to prevent blistering of the face caused by implantation of atoms or ions into the face. The liner may be disposable and removed from the face in the vacuum chamber and replaced with a new liner in some embodiments. This liner may be a polymer with a roughened surface, be carbon-based, or be composed of carbon nanotubes in some embodiments.
    Type: Application
    Filed: January 14, 2009
    Publication date: July 16, 2009
    Applicant: VARIAN SEMICONDUCTOR EQUPIMENT ASSOCIATE, INC.
    Inventors: Lyudmila Stone, Julian G. Blake, Dale K. Stone, Ron S. Serisky