Patents by Inventor Ronald Anthony DellaGuardia

Ronald Anthony DellaGuardia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6365321
    Abstract: A photoresist binder composition comprising a homogeneous blend of (i) a hydroxystyrene copolymer comprising a first monomer that is optionally substituted hydroxystyrene and a second monomer containing an acid labile group, preferably pendant to the polymer backbone, and (ii) and a phenolic polymer, that is optionally partially or wholly protected, such as polyhydroxystyrene, poly(hydroxystyrene-co-styrene), poly(hydroxystyrene-co-styrene-co-t-butyl acrylate), novolac, and the like. Also provided is a lithographic resist composition comprising the homogeneous blend of the photoresist binder composition, and a radiation-sensitive acid generator which generates an acid upon exposure to radiation, and a process for using the resist composition to generate resist images on a substrate, such as in the manufacture of integrated circuits or the like.
    Type: Grant
    Filed: April 13, 1999
    Date of Patent: April 2, 2002
    Assignee: International Business Machines Corporation
    Inventors: Kuang-Jung Chen, Ronald Anthony DellaGuardia, Hiroshi Ito, George Michael Jordhamo, Ahmad Dauod Katnani