Abstract: A housing provides temperature monitoring and temperature control of a specimen, while the specimen is being exposed to plasma environments for in-situ reactivity studies or other plasma processing purposes. The housing is adaptable for use with a temperature controller and a pressure measurement device. The housing includes a temperature monitoring mechanism and temperature control connections. The temperature monitoring mechanism provides in-situ specimen temperature indications. It includes a first enclosure having a specimen supporting portion on an exterior surface thereof. A fluid conduit has a first end in fluid communication with an interior portion of the first closure. A second enclosure has an interior portion thereof in fluid communication with a second end of the fluid conduit. The second enclosure includes the ability for attachment to a pressure measurement device.

Abstract: A system and process for enhancing the surface of a material for cleaning, material removal or preparation for adhesive bonding or etching. An environment is provided which includes a skin region in which charged particles may be generated. An exposure region is spaced from the skin region. A material may be positioned in the exposure region which contains neutral, chemically active particles generated by the charged particles. When the material to be altered is positioned in the exposure region, a desired surface of the material chemically reacts with the neutral, chemically active particles so as to alter the surface as desired for cleaning, material removal or as preparation for adhesive bonding or etching.