Patents by Inventor Ronald Franciscus Herman Hugers
Ronald Franciscus Herman Hugers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230280660Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: May 11, 2023Publication date: September 7, 2023Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL, Ronald Franciscus Herman HUGERS, Jan Adrianus BOER, Edwin Johannes Cornelis BOS, Andreas Johannes Antonius BROUNS, Vitaliy PROSYENTSOV, Paul William SCHOLTES - VAN EIJK, Paulus Antonius Andreas TEUNISSEN, Mahesh Upendra AJGAONKAR
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Publication number: 20230221659Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: ApplicationFiled: March 1, 2023Publication date: July 13, 2023Applicant: ASML NETHERLANDS B. V.Inventors: Yongfeng NI, Ronald Franciscus Herman HUGERS, Andreas Johannes Antonius BROUNS
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Patent number: 11687009Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: May 11, 2022Date of Patent: June 27, 2023Assignees: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Publication number: 20230144419Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.Type: ApplicationFiled: December 20, 2022Publication date: May 11, 2023Applicant: ASML NETHERLANDS B.V.Inventors: John Colin TRAVERS, Federico BELLI, Malte Christian BRAHMS, Andreas Johannes Antonius BROUNS, Ronald Franciscus Herman HUGERS
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Patent number: 11619887Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: GrantFiled: August 18, 2020Date of Patent: April 4, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Yongfeng Ni, Ronald Franciscus Herman Hugers, Andreas Johannes Antonius Brouns
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Patent number: 11563298Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.Type: GrantFiled: August 30, 2021Date of Patent: January 24, 2023Assignee: ASML Netherlands B.V.Inventors: John Colin Travers, Federico Belli, Malte Christian Brahms, Andreas Johannes Antonius Brouns, Ronald Franciscus Herman Hugers
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Publication number: 20220269183Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: May 11, 2022Publication date: August 25, 2022Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes - Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Patent number: 11360396Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: August 27, 2020Date of Patent: June 14, 2022Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Patent number: 11327412Abstract: A topography measurement system includes a radiation source; a first grating; imaging optics; a movement mechanism; detection optics; a second grating; and a detector. The radiation source is configured to generate a radiation beam and includes a light emitting diode to produce to the radiation. The first grating is configured to pattern the radiation beam. The imaging optics is configured to form a first image of the first grating at a target location on a substrate. The movement mechanism is operable to move the substrate relative to the image of the first grating such that the target location moves relative to the substrate. The detection optics is configured to receive radiation from the target location of the substrate and form an image of the first image at the second grating. The detector is configured to receive radiation transmitted through the second grating and produce an output signal.Type: GrantFiled: November 30, 2016Date of Patent: May 10, 2022Assignee: ASML NETHERLANDS B.V.Inventors: Ronald Franciscus Herman Hugers, Martinus Cornelis Reijnen, Paulus Antonius Andreas Teunissen
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Patent number: 11275313Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.Type: GrantFiled: March 26, 2021Date of Patent: March 15, 2022Assignee: ASML Netherlands B.V.Inventors: Paul William Scholtes-Van Eijk, Ronald Franciscus Herman Hugers
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Publication number: 20220069537Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.Type: ApplicationFiled: August 30, 2021Publication date: March 3, 2022Applicant: ASML NETHERLANDS B.V.Inventors: John Colin TRAVERS, Federico BELLI, Malte Christian BRAHMS, Andreas Johannes Antonius BROUNS, Ronald Franciscus Herman HUGERS
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Publication number: 20210240088Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.Type: ApplicationFiled: March 26, 2021Publication date: August 5, 2021Applicant: ASML Netherlands B.V.Inventors: Paul William SCHOLTES - VAN EIJK, Ronald Franciscus Herman HUGERS
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Patent number: 10990021Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.Type: GrantFiled: February 13, 2020Date of Patent: April 27, 2021Assignee: ASML Netherlands B.V.Inventors: Paul William Scholtes-Van Eijk, Ronald Franciscus Herman Hugers
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Publication number: 20210063900Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.Type: ApplicationFiled: August 18, 2020Publication date: March 4, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Yongfeng NI, Ronald Franciscus Herman HUGERS, Andreas Johannes Antonius BROUNS
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Publication number: 20210063894Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: August 27, 2020Publication date: March 4, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL, Ronald Franciscus Herman HUGERS, Jan Adrianus BOER, Edwin Johannes Cornelis BOS, Andreas Johannes Antonius BROUNS, Vitaliy PROSYENTSOV, Paul William SCHOLTES - VAN EIJK, Paulus Antonius Andreas TEUNISSEN, Mahesh Upendra AJGAONKAR
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Publication number: 20200264521Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.Type: ApplicationFiled: February 13, 2020Publication date: August 20, 2020Applicant: ASML Netherlands B.V.Inventors: Paul William SCHOLTES-VAN EIJK, Ronald Franciscus Herman HUGERS
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Patent number: 10520824Abstract: A light combiner (500) for use in a metrology tool includes a plurality of light sources (LED 1, LED 2, LED 3, LED 4, LED 5), a first filter (502), and a second filter (504). The first filter is designed to substantially reflect light generated from a first source of the plurality of light sources, and to substantially transmit light generated from a second source of the plurality of light sources. The second filter is designed to substantially reflect light generated from the first source and the second source of the plurality of light sources, and to substantially transmit light generated from a third source of the plurality of light sources. An angle of incidence of the light generated from the first source on a surface of the first filter is less than 30 degrees.Type: GrantFiled: February 7, 2017Date of Patent: December 31, 2019Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Ronald Franciscus Herman Hugers, Parag Vinayak Kelkar, Paulus Antonius Andreas Teunissen
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Publication number: 20190049864Abstract: A light combiner (500) for use in a metrology tool includes a plurality of light sources (LED 1, LED 2, LED 3, LED 4, LED 5), a first filter (502), and a second filter (504). The first filter is designed to substantially reflect light generated from a first source of the plurality of light sources, and to substantially transmit light generated from a second source of the plurality of light sources. The second filter is designed to substantially reflect light generated from the first source and the second source of the plurality of light sources, and to substantially transmit light generated from a third source of the plurality of light sources. An angle of incidence of the light generated from the first source on a surface of the first filter is less than 30 degrees.Type: ApplicationFiled: February 7, 2017Publication date: February 14, 2019Applicants: ASML Netherlands B.V, ASML Holding N.V.Inventors: Ronald Franciscus Herman HUGERS, Parag Vnayak KELKAR, Paulus Antonius Andreas TEUNISSEN
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Publication number: 20180373171Abstract: A topography measurement system includes a radiation source; a first grating; imaging optics; a movement mechanism; detection optics; a second grating; and a detector. The radiation source is configured to generate a radiation beam and includes a light emitting diode to produce to the radiation. The first grating is configured to pattern the radiation beam. The imaging optics is configured to form a first image of the first grating at a target location on a substrate. The movement mechanism is operable to move the substrate relative to the image of the first grating such that the target location moves relative to the substrate. The detection optics is configured to receive radiation from the target location of the substrate and form an image of the first image at the second grating. The detector is configured to receive radiation transmitted through the second grating and produce an output signal.Type: ApplicationFiled: November 30, 2016Publication date: December 27, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Ronald Franciscus Herman HUGERS, Martinus Cornelis REIJNEN, Paulus Antonius Andreas TEUNISSEN
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Patent number: 8125615Abstract: To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens. The optical focus sensor includes a splitter configured to split the radiation beam into a first sub-beam and a second sub-beam. With an aperture and a detector in the light path of each of the sub-beams it is possible to detect whether the substrate is in focus by comparing the amount of radiation received by each of the detectors.Type: GrantFiled: October 9, 2008Date of Patent: February 28, 2012Assignee: ASML Netherlands B.V.Inventors: Willem Kalf, Ronald Franciscus Herman Hugers