Abstract: The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus (100) for steering light has a base layer (110), a beam layer (114) and a folded flexure assembly (120) coupled therebetween. The folded flexure assembly complete underlies the beam layer, and facilitates rotation of the beam layer relative to the base layer. The flexure assemblies further provide a counter rotation force to help prevent the beam layer from sticking in an actuated position. In one aspect, the base layer includes raised portions (140, 142) which operate as mechanical stops for the beam layer. In this manner, the counter rotation force helps prevent the beam layer from sticking to the base layer or the raised portions.

Abstract: An athermalized wavelength router comprises a base, a fiber optic input and output component, a routing array having a plurality of reflectors and a routing array/input and output mount that mounts the routing array and the input and output component to the base. The router further includes a grating and a grating mount that mounts the grating to the base. A lens is positioned between the input and output component and the grating. The base, the routing array/input and output mount and the grating mount are configured to maintain a generally constant focal length and a pointing angle onto the routing array as the temperature of the router changes.