Patents by Inventor Ronald James Alexander Holmes

Ronald James Alexander Holmes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of mechanical polishing
    Patent number: 6110831
    Abstract: A method of manufacturing integrated circuits utilizing chemical mechanical polishing (CMP) is disclosed. A dielectric layer, illustratively, having a dopant, dye, etc. termed a "marker layer" is formed upon a wafer having partially fabricated integrated circuits thereon. An undoped, undyed layer is deposited upon the marker layer. The undoped or undyed layer is polished and the waste slurry is monitored until a signal indicating the exposure of the signal layer is obtained. Analysis of the signal provides an indication of when the CMP process should be terminated.
    Type: Grant
    Filed: September 4, 1997
    Date of Patent: August 29, 2000
    Assignee: Lucent Technologies Inc.
    Inventors: James Thomas Cargo, Ronald James Alexander Holmes, Ruichen Liu, Alvaro Maury