Patents by Inventor Ronald Peter TOTILLO

Ronald Peter TOTILLO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic clamp and a method for manufacturing the same
    Patent number: 10310391
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: June 4, 2019
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Tammo Uitterdijk, Steven Michael Zimmerman
  • Electrostatic clamp and a method for manufacturing the same
    Patent number: 10274842
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: April 30, 2019
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Tammo Uitterdijk, Steven Michael Zimmerman
  • An Electrostatic Clamp and a Method for Manufacturing the Same
    Publication number: 20170242345
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Application
    Filed: July 9, 2015
    Publication date: August 24, 2017
    Applicant: ASML Holding N.V.
    Inventors: Matthew LIPSON, Vincent DIMILIA, Ronald Peter TOTILLO, Tammo UITTERDIJK, Steven Michael ZIMMERMAN