Patents by Inventor Ronald Walther Severijns

Ronald Walther Severijns has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20060197036
    Abstract: A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path of the projection beam of radiation; and a pressure circuit for controlling the article clamp, comprising a supply line for connection with the article clamp. According to the invention, a buffer volume is provided for providing a buffered gas pressure pulse in the supply line. In this way, faster clamp response times can be realized.
    Type: Application
    Filed: February 22, 2005
    Publication date: September 7, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Ronald Walther Severijns, Marcel Johannus Hubertus Muitjens, Sonia Skelly, Theodorus Cadee