Abstract: A noise blanker (40, 106) monitors and removes noise from a sampled signal by adaptive filtering (98, 150) the sampled signal to generate trained adaptive filter prediction coefficients. The sampled signal is provided as an output signal when the noise blanker is in a training mode. A noise monitor (34, 154) detects whether noise contained within the sampled signal exceeds a predetermined threshold and provides a control signal in response to the detecting. The noise blanker is placed in a prediction mode for a predetermined amount of time in response to asserting the control signal. A prediction output signal is generated using a plurality of prediction coefficients as an all-pole filter. The prediction output signal has minimal noise content.

Abstract: A process and system for heating semiconductor substrates in a processing chamber on a susceptor as disclosed. In accordance with the present invention, the susceptor includes a support structure made from a material having a relatively low thermal conductivity for suspending the wafer over the susceptor. The support structure has a particular height that inhibits or prevents radial temperature gradients from forming in the wafer during high temperature processing. If needed, recesses can be formed in the susceptor for locating and positioning a support structure. The susceptor can include a wafer supporting surface defining a pocket that has a shape configured to conform to the shape of a wafer during a heat cycle.

Abstract: A noise blanker (40, 106) monitors and removes noise from a sampled signal by adaptive filtering (98, 150) the sampled signal to generate trained adaptive filter prediction coefficients. The sampled signal is provided as an output signal when the noise blanker is in a training mode. A noise monitor (34, 154) detects whether noise contained within the sampled signal exceeds a predetermined threshold and provides a control signal in response to the detecting. The noise blanker is placed in a prediction mode for a predetermined amount of time in response to asserting the control signal. A prediction output signal is generated using a plurality of prediction coefficients as an all-pole filter. The prediction output signal has minimal noise content.