Patents by Inventor Ronen Eynat

Ronen Eynat has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample
    Patent number: 7504647
    Abstract: Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    Type: Grant
    Filed: August 22, 2006
    Date of Patent: March 17, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Gal Amar, Avishay Guetta, Doron Shoham, Gilad Schwartz, Ronen Eynat
  • Optical inspection with alternating configurations
    Patent number: 7397552
    Abstract: An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
    Type: Grant
    Filed: September 22, 2005
    Date of Patent: July 8, 2008
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Avishay Guetta, Doron Korngut, Doron Shoham, Iddo Pinkas, Ronen Eynat
  • Inspection System with Auto-Focus
    Publication number: 20070034773
    Abstract: Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    Type: Application
    Filed: August 22, 2006
    Publication date: February 15, 2007
    Inventors: Gal Amar, Avishay Guetta, Doron Shoham, Gilad Schwartz, Ronen Eynat
  • Method and apparatus for inspecting a sample having a height measurement ahead of a focal area
    Patent number: 7115890
    Abstract: Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: October 3, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Gal Amar, Avishay Guetta, Doron Shoham, Gilad Schwartz, Ronen Eynat
  • Optical inspection with alternating configurations
    Publication number: 20060066843
    Abstract: An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
    Type: Application
    Filed: September 22, 2005
    Publication date: March 30, 2006
    Inventors: Avishay Guetta, Doron Korngut, Doron Shoham, Iddo Pinkas, Ronen Eynat
  • Inspection system with auto-focus
    Publication number: 20050167568
    Abstract: Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
    Type: Application
    Filed: June 25, 2004
    Publication date: August 4, 2005
    Inventors: Gal Amar, Avishay Guetta, Doron Shoham, Gilad Schwartz, Ronen Eynat