Patents by Inventor Rong-Shyan Pan

Rong-Shyan Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical dispense system with reduced contamination
    Patent number: 10161545
    Abstract: An apparatus includes a production tool and a pipe connected to the production tool. The pipe includes an inner pipe formed of a metal-free material, an outer pipe encircling the inner pipe, and an inlet connected to a channel between the inner pipe and the outer pipe. The apparatus further includes a chemical supply system connected to the pipe. The chemical supply system is configured to supply a chemical through a channel encircled by the inner pipe to the production tool.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rong-Shyan Pan, Yung-Long Chen, Heng-Yi Tzeng, Shao-Yen Ku, Chih-Chiang Tseng
  • Chemical Dispense System with Reduced Contamination
    Publication number: 20170023158
    Abstract: An apparatus includes a production tool and a pipe connected to the production tool. The pipe includes an inner pipe formed of a metal-free material, an outer pipe encircling the inner pipe, and an inlet connected to a channel between the inner pipe and the outer pipe. The apparatus further includes a chemical supply system connected to the pipe. The chemical supply system is configured to supply a chemical through a channel encircled by the inner pipe to the production tool.
    Type: Application
    Filed: October 5, 2016
    Publication date: January 26, 2017
    Inventors: Rong-Shyan Pan, Yung-Long Chen, Heng-Yi Tzeng, Shao-Yen Ku, Chih-Chiang Tseng
  • Chemical dispense system with reduced contamination
    Patent number: 9494261
    Abstract: An apparatus includes a production tool and a pipe connected to the production tool. The pipe includes an inner pipe formed of a metal-free material, an outer pipe encircling the inner pipe, and an inlet connected to a channel between the inner pipe and the outer pipe. The apparatus further includes a chemical supply system connected to the pipe. The chemical supply system is configured to supply a chemical through a channel encircled by the inner pipe to the production tool.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: November 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Rong-Shyan Pan, Yung-Long Chen, Heng-Yi Tzeng, Shao-Yen Ku, Chih-Chiang Tseng