Abstract: Methods for reducing resistivity of metal gapfill include depositing a conformal layer in an opening of a feature and on a field of a substrate with a first thickness of the conformal layer of approximately 10 microns or less, depositing a non-conformal metal layer directly on the conformal layer at a bottom of the opening and directly on the field using an anisotropic deposition process. A second thickness of the non-conformal metal layer on the field and on the bottom of the feature is approximately 30 microns or greater. And depositing a metal gapfill material in the opening of the feature and on the field where the metal gapfill material completely fills the opening without any voids.

Abstract: A method and apparatus for forming tungsten features in semiconductor devices is provided. The method includes exposing a top opening of a feature formed in a substrate to a physical vapor deposition (PVD) process to deposit a tungsten liner layer within the feature. The PVD process is performed in a first processing region of a first processing chamber and the tungsten liner layer forms an overhang portion, which partially obstructs the top opening of the feature. The substrate is transferred from the first processing region of the first processing chamber to a second processing region of a second processing chamber without breaking vacuum. The overhang portion is exposed to nitrogen-containing radicals in the second processing region to inhibit subsequent growth of tungsten along the overhang portion. The feature is exposed to a tungsten-containing precursor gas to form a tungsten fill layer over the tungsten liner layer within the feature.

Abstract: Disclosed are a continuous-curvature convex roll for continuously casting a bloom, and a manufacturing method therefore. An outer contour curve of a working portion of a body of the continuous-curvature convex roll contains a first straight-line segment (AB), a first transition curve segment (BC), an intermediate straight-line segment (CD), a second transition curve segment (DE) and a second straight-line segment (EF). The BC, the AB, and the CD have continuous first-order derivatives, continuous second-order derivatives, and continuous curvatures, thus forming a first transition curve with a continuous curvature. The BC and the DE are mirror-symmetrical. The continuous-curvature convex roll can uniformly deform a blank cast in a deformation area, thereby reducing cracks. The transition curve of the convex roll can be reduced, thereby being capable of further reducing a rolling pressure and the withdrawal resistance.

Abstract: Disclosed is a light reduction method for continuous casting of a bloom plain-barrelled roll-roll combination. The method comprises: firstly obtaining three-dimensional temperature field profile, a two-phase region, solid-phase region thickness, and solid-phase fraction of a billet, determining positions of start and end rolls of the reduction, and setting a reduction amount of each tensioner roll according to the volume shrinkage of the billet; in an interval fs=0.9-1.0 of the solid-phase fraction of the billet, performing a heavy reduction working mode; and in an interval fs=0.25-0.80 of the solid-phase fraction of the billet, performing a light reduction working mode.

Abstract: Disclosed is a light reduction method for continuous casting of a bloom plain-barrelled roll-roll combination. The method comprises: firstly obtaining three-dimensional temperature field profile, a two-phase region, solid-phase region thickness, and solid-phase fraction of a billet, determining positions of start and end rolls of the reduction, and setting a reduction amount of each tensioner roll according to the volume shrinkage of the billet; in an interval fs=0.9-1.0 of the solid-phase fraction of the billet, performing a heavy reduction working mode; and in an interval fs=0.25-0.80 of the solid-phase fraction of the billet, performing a light reduction working mode.

Abstract: Disclosed are a continuous-curvature convex roll for continuously casting a bloom, and a manufacturing method therefore, belonging to the field of metal casting. An outer contour curve of a working portion of a body of the continuous-curvature convex roll consists of a first straight-line segment (AB), a first transition curve segment (BC), a intermediate straight-line segment (CD), a second transition curve segment (DE) and a second straight-line segment (EF). The first transition curve segment (BC), the first straight-line segment (AB), and the intermediate straight-line segment (CD) have continuous first-order derivatives, continuous second-order derivatives, and continuous curvatures, thus forming a first transition curve with a continuous curvature. The first transition curve segment (BC) and the second transition curve segment (DE) are mirror-symmetrical.

Abstract: A water-cooled mold for continuous casting includes two water-cooled wide copper plates arranged opposite to each other in a front and back direction and two water-cooled narrow copper plates arranged opposite to each other in a left and right direction. The upper portion of the cavity of the mold is a sprue area and the lower portion of the cavity is a mold cavity area. The sprue area is gradually narrowed in the casting direction and smoothly transited into the mold cavity, corresponding to the shape of a slab to be cast. The inside surfaces of the water-cooled narrow copper plates are smooth planar surfaces. A portion of the inside surface of the water-cooled wide copper plates in the sprue area is a curved surface and another portion in the mold cavity area is a planar surface. The curved surface and the planar surface portions form a continuous smooth surface.

Abstract: The invention provides a water-cooled mold for continuous casting. The mold comprises two water-cooled wide copper plates which are arranged opposite to each other in front and back direction and two water-cooled narrow copper plates which are arranged opposite to each other in left and right direction. The upper portion of the cavity of the mold is a sprue area and the lower portion of the cavity is a mold cavity area. The sprue area is gradually narrowed in the casting direction and smoothly transited into the mold cavity, corresponding to the shape of a slab to be cast. The inside surfaces of the water-cooled narrow copper plates are smooth planar surface. A portion of the inside surface of the water-cooled wide copper plates in the sprue area is a curved surface and a portion of the same in the mold cavity area is a planar surface. The curved surface portion and the planar surface portion form a continuous smooth surface.