Patents by Inventor Rony Abaron

Rony Abaron has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for optical inspection of wafers during polishing
    Patent number: 6368182
    Abstract: A monitoring tool for monitoring an article in a wet environment, the monitoring tool including a monitoring station having an optical unit, a liquid holding unit for receiving the article, and a window, through which at least a portion of the article is viewable by the optical unit, a buffer station associated with the monitoring station having a plurality of supporting assemblies for receiving the article before and after being monitored, wherein at least one of the supporting assemblies includes a liquid receptacle for holding the article therein, and a gripping unit operating in conjunction with the monitoring station for moving the article from the buffer station to the liquid holding unit of the monitoring station.
    Type: Grant
    Filed: June 11, 2001
    Date of Patent: April 9, 2002
    Assignee: Nova Measuring Instruments Ltd.
    Inventors: Eran Dvir, Moshe Finarov, Eli Haimovich, Benjamin Shulman, Rony Abaron