Patents by Inventor Rosemary Twist

Rosemary Twist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus
    Patent number: 7674352
    Abstract: A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.
    Type: Grant
    Filed: November 28, 2006
    Date of Patent: March 9, 2010
    Assignee: Applied Materials, Inc.
    Inventors: David Bour, Lori Washington, Sandeep Nijhawan, Ronald Stevens, Jacob Smith, Alexander Tam, Nyi Oo Myo, Steve Park, Rosemary Twist, Garry Kwong, Jie Su
  • SYSTEM AND METHOD FOR DEPOSITING A GASEOUS MIXTURE ONTO A SUBSTRATE SURFACE USING A SHOWERHEAD APPARATUS
    Publication number: 20080124463
    Abstract: A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.
    Type: Application
    Filed: November 28, 2006
    Publication date: May 29, 2008
    Applicant: Applied Materials, Inc.
    Inventors: David Bour, Lori Washington, Sandeep Nijhawan, Ronald Stevens, Jacob Smith, Alexander Tam, Nyi O. Myo, Steve Park, Rosemary Twist, Garry Kwong, Jie Su