Patents by Inventor Ross E. Lack

Ross E. Lack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing composition
    Publication number: 20020062600
    Abstract: A polishing composition for chemical mechanical polishing of semiconductor wafers having a copper metal circuit includes, an aqueous composition having a pH of under 5.0, and polyacrylic acid having a number average molecular weight of about 20,000-150,000, or blends of high and low number average molecular weight polyacrylic acids.
    Type: Application
    Filed: August 9, 2001
    Publication date: May 30, 2002
    Inventors: Glenn C. Mandigo, Terence M. Thomas, Craig D. Lack, Ross E. Lack, Jinru Bian, Tirthankar Ghosh