Patents by Inventor Ross H. Burck

Ross H. Burck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum operated wafer transfer apparatus
    Patent number: 5261776
    Abstract: The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer grips which hold the wafers until the wafer platform is lowered and a second wafer about is in position to receive the wafers. The wafer platform is actuated by the negative pressure applied to alternating sides of a stage which divides a sealed cabinet into two portions. A vacuum is applied to alternating sides of the stage, while ambient air is introduced into the other side, causing the stage to move in the direction of lower pressure. The platform is affixed to the stage on at least two points.
    Type: Grant
    Filed: April 27, 1989
    Date of Patent: November 16, 1993
    Assignee: Micron Technology, Inc.
    Inventors: Ross H. Burck, Ernest E. Marks, Scott E. Moore
  • Method of transferring wafers using vacuum
    Patent number: 5100287
    Abstract: The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer grips which hold the wafers until the wafer platform is lowered and a second wafer about is in position to receive the wafers. The wafer platform is actuated by the negative pressure applied to alternating sides of a stage which divides a sealed cabinet into two portions. A vacuum is applied to alternating sides of the stage, while ambient air is introduced into the other side, causing the stage to move in the direction of lower pressure. The platform is affixed to the stage on at least two points.
    Type: Grant
    Filed: October 30, 1990
    Date of Patent: March 31, 1992
    Assignee: Micron Technology, Inc.
    Inventors: Ross H. Burck, Ernest E. Marks, Scott E. Moore