Patents by Inventor Ross H. Winnick

Ross H. Winnick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas discharge laser long life electrodes
    Patent number: 6466602
    Abstract: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: October 15, 2002
    Assignee: Cymer, Inc.
    Inventors: Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko, Jean-Marc Hueber, Richard G. Morton, Eckehard D. Onkels, Robert A. Shannon, Ross H. Winnick
  • Gas discharge laser with blade-dielectric electrode
    Patent number: 6414979
    Abstract: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: July 2, 2002
    Assignee: Cymer, Inc.
    Inventors: Richard C. Ujazdowski, Michael C. Cates, Richard G. Morton, Jean-Marc Hueber, Ross H. Winnick
  • Gas discharge laser with blade-dielectric electrode
    Publication number: 20010050939
    Abstract: A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
    Type: Application
    Filed: January 23, 2001
    Publication date: December 13, 2001
    Inventors: Richard C. Ujazdowski, Michael C. Cates, Richard G. Morton, Jean-Marc Hueber, Ross H. Winnick