Patents by Inventor Ross REINHARDT
Ross REINHARDT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Apparatus And Tuning Method For Mitigating RF Load Impedance Variations Due To Periodic Disturbances
Publication number: 20230049104Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.Type: ApplicationFiled: November 2, 2022Publication date: February 16, 2023Inventors: Aaron BURRY, Aaron RADOMSKI, Mariusz OLDZIEJ, Peter PAUL, Ross REINHARDT -
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
Patent number: 11527384Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.Type: GrantFiled: November 24, 2020Date of Patent: December 13, 2022Assignee: MKS Instruments, Inc.Inventors: Aaron M. Burry, Aaron T. Radomski, Mariusz Oldziej, Peter Paul, Ross Reinhardt -
Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances
Publication number: 20220165545Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.Type: ApplicationFiled: November 24, 2020Publication date: May 26, 2022Inventors: Aaron M. BURRY, Aaron T. RADOMSKI, Mariusz OLDZIEJ, Peter PAUL, Ross REINHARDT -
Patent number: 10930470Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: December 11, 2019Date of Patent: February 23, 2021Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Patent number: 10692698Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: GrantFiled: July 11, 2019Date of Patent: June 23, 2020Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill, Richard Pham
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Patent number: 10666206Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: GrantFiled: December 19, 2017Date of Patent: May 26, 2020Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill
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Publication number: 20200144025Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: December 11, 2019Publication date: May 7, 2020Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Patent number: 10546724Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: GrantFiled: May 9, 2018Date of Patent: January 28, 2020Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
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Publication number: 20190333738Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: ApplicationFiled: July 11, 2019Publication date: October 31, 2019Applicant: MKS Instruments, Inc.Inventors: David J. COUMOU, Ross REINHARDT, Yuriy ELNER, Daniel M. GILL, Richard PHAM
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Patent number: 10395895Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: GrantFiled: August 27, 2015Date of Patent: August 27, 2019Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill, Richard Pham
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Publication number: 20180330921Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.Type: ApplicationFiled: May 9, 2018Publication date: November 15, 2018Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
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Publication number: 20180109230Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: ApplicationFiled: December 19, 2017Publication date: April 19, 2018Inventors: David J. COUMOU, Ross REINHARDT, Yuriy ELNER, Daniel M. GILL
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Patent number: 9876476Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: GrantFiled: August 18, 2015Date of Patent: January 23, 2018Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuriy Elner, Daniel M. Gill
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Patent number: 9721758Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.Type: GrantFiled: July 13, 2015Date of Patent: August 1, 2017Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Ross Reinhardt, Yuiry Elner, Daniel M. Gill
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Publication number: 20170062186Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.Type: ApplicationFiled: August 27, 2015Publication date: March 2, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL, Richard PHAM
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Publication number: 20170054418Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.Type: ApplicationFiled: August 18, 2015Publication date: February 23, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL
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Publication number: 20170018926Abstract: A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates a plurality of RF output signals. The matching network includes a ratio tuning element to vary a ratio of power between the plurality of RF output signals. The first controller communicates a ratio control signal to the matching network, and the matching network controls the ratio tuning element in accordance with the ratio control signal. The RF controls system operates in a continuous and pulse mode of operation. The controller can also control the rise or fall of a pulse edge or a level or duration of incremental changes in the pulse edge.Type: ApplicationFiled: July 13, 2015Publication date: January 19, 2017Inventors: David J. COUMOU, Ross REINHARDT, Yuiry ELNER, Daniel M. GILL