Patents by Inventor Roy Hendrikus Emilie Maria JACOBS

Roy Hendrikus Emilie Maria JACOBS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibration isolation system and lithographic apparatus
    Patent number: 11422477
    Abstract: The invention provides a vibration isolation system (IS), comprising a piston (402) to carry a payload, a connecting member (410), a spring (404) and a flexible member (408). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to apply a force to the piston along the direction via the connecting member with a negative stiffness.
    Type: Grant
    Filed: April 23, 2019
    Date of Patent: August 23, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Roy Hendrikus Emilie Maria Jacobs, Cornelius Adrianus Lambertus De Hoon, Jeroen Pieter Starreveld, Johannes Petrus Martinus Bernardus Vermeulen
  • Vibration Isolation System and Lithographic Apparatus
    Publication number: 20210080835
    Abstract: The invention provides a vibration isolation system (IS), comprising a piston (402) to carry a payload, a connecting member (410), a spring (404) and a flexible member (408). The spring is arranged to support the piston along a direction with a positive stiffness. The flexible member is arranged to apply a force to the piston along the direction via the connecting member with a negative stiffness.
    Type: Application
    Filed: April 23, 2019
    Publication date: March 18, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Roy Hendrikus Emilie Maria JACOBS, Cornelius Adrianus Lambertus DE HOON, Jeroen Pieter STARREVELD, Johannes Petrus Martinus Ber VERMEULEN