Abstract: A system and method of protecting production tooling used in semiconductor fabrication from potentially damaging low temperatures or sudden temperature drops during periods of primary power outage and low outside temperatures. The boilers and pumps at a central utility plant (CUP) which normally provide superheated water under pressure to heat exchangers in each building to be heated are cut back to a fraction of their normal heating capacity during periods of primary power outage, although air continues to be exhausted from, and outside air taken into fabrication buildings. In the present invention, an additional heat exchanger is placed in each building which houses production tooling, and the coolant from the engine used to drive the generator for powering the air handling equipment in the building may be selectively directed through one of the flow paths of the second heat exchanger.

Abstract: An air filtering system for a clean room has a make-up air handling unit that supplies filtered make-up air to a primary air handling unit. The make-up air that enters the make-up air handling unit is supplied from an outside source (such as the air outside of a building containing the clean room). Recirculation air from the clean room is also supplied to the primary air handling unit. A chemical filter filters both the make-up air and the recirculation air prior to the make-up air and the recirculation air entering the clean room. All recirculation air from the clean room and all make-up air passes through the chemical filter and the primary air handling unit prior to introduction to the clean room.

Abstract: A make-up air handler for supplying outside air to clean environments such as clean rooms in semiconductor fabrication facilities includes a flow passage through which the outside air is passed. At least one filter is disposed to filter the outside air passing through the flow passage. The make-up air handler preferably includes all boron-free filters to prevent the introduction of boron into the outside air by the filters. The make-up air handler can include boron-free ULPA filters to provide highly clean boron-free outside air for supplying to clean environments. The make-up air handler can be operated in a normal manner at air velocities exceeding the rated velocities of the ULPA filters, without subjecting the ULPA filters to air velocities exceeding their ratings, due to the configuration and arrangement of the ULPA filters in the flow passage.

Abstract: A storage system for storing clean room products includes an enclosed compartment located within or adjacent to a clean room. The compartment includes storage sheles and a horizontal air flow system that includes an air filter, an air exhaust, a blower, and a plenum.

Abstract: A flowhood work station has an inspection chamber having a perforated inspection surface. An air filtration housing is in fluid communication with the perforated inspection surface. A blower is capable of directing air downwardly through the perforated inspection surface. A return air plenum is in fluid communication with the perforated inspection surface and with the air filtration housing. The return air plenum captures a substantial portion of the air passing through the perforated inspection surface and directs the air to the air filtration housing.