Patents by Inventor Ru-Gyn Liu

Ru-Gyn Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Printable assist lines and the removal of such
    Patent number: 6929887
    Abstract: A new method of applying FSAF is provided that optimizes the distribution of the spatial frequency and the unification of the photolithographic exposure level. The FSAF are removed by an additional exposure, using a specially designed mask that contains erasing features at the location of the FSAF.
    Type: Grant
    Filed: April 18, 2002
    Date of Patent: August 16, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Burn-Jeng Lin, Ru-Gyn Liu, Gue Wuu Hwang