Patents by Inventor Ruben Etienne Johan Rinus VANDERVELDEN

Ruben Etienne Johan Rinus VANDERVELDEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method
    Patent number: 11789373
    Abstract: The invention relates to an object positioning system including an actuator system and a measurement system. The actuator system includes an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field includes a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of the actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system includes a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: October 17, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Bas Jansen, Samer Abdelmoeti Abuzeid Abdelmoeti, Hans Butler, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden
  • AN OBJECT POSITIONING SYSTEM DIAGNOSTIC AND CALIBRATION METHODS POSITIONING CONTROL METHOD LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20220197157
    Abstract: The invention relates to an object positioning system including: an actuator system and a measurement system. The actuator system comprises an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field comprises a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of said actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system comprises a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.
    Type: Application
    Filed: March 10, 2020
    Publication date: June 23, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Bas JANSEN, Samer Abdelmoeti Abuzeid ABDELMOETI, Hans BUTLER, Koen Johan Frederik LOONEN, Aditya SINGH, Ruben Etienne Johan Rinus VANDERVELDEN