Patents by Inventor Rudi Wilhelm

Rudi Wilhelm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6974781
    Abstract: A method is provided for obtaining stable and elevated deposition rates in a reaction chamber, following the cleaning of the chamber. The method involves cleaning of the chamber, pre-coating the interior surfaces of the reaction chamber with an inorganic composition, and then, using the pre-coated chamber to deposit an organic layer onto a workpiece.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: December 13, 2005
    Assignee: ASM International N.V.
    Inventors: Eric A. H. Timmermans, Maarten J. Teepen, Raffaele Mucciato, Rudi Wilhelm
  • Publication number: 20050085098
    Abstract: A method is provided for obtaining stable and elevated deposition rates in a reaction chamber, following the cleaning of the chamber. The method involves cleaning of the chamber, pre-coating the interior surfaces of the reaction chamber with an inorganic composition, and then, using the pre-coated chamber to deposit an organic layer onto a workpiece.
    Type: Application
    Filed: October 20, 2003
    Publication date: April 21, 2005
    Inventors: Eric Timmermans, Maarten Teepen, Raffaele Mucciato, Rudi Wilhelm
  • Publication number: 20010047761
    Abstract: Method for the treatment of semiconductor substrates as well as an oven-boat system for this purpose. The oven is embodied as a vertical oven and it is aimed to simultaneously treat a number of substrates arranged one above the other in a boat. To carry out the deposition and such processes at raised temperatures as uniformly as possible, that is, so that each semiconductor substrate substantially undergoes the same treatment, it is proposed on the one hand to vary the ratio of the volume limited by two consecutive armrests and on the other hand the volume limited by screening off the process area and the edge of the substrates from the insertion end of the gas to the discharge end of the gas that flows through the oven.
    Type: Application
    Filed: May 7, 2001
    Publication date: December 6, 2001
    Inventors: Margreet Obertine Anne-Marie Van Wijck, Rudi Wilhelm, Ernst Hendrik August Granneman
  • Patent number: 6240875
    Abstract: Method for the treatment of semiconductor substrates as well as an oven-boat system for this purpose. The oven is embodied as a vertical oven and it is aimed to simultaneously treat a number of substrates arranged one above the other in a boat. To carry out the deposition and such processes at raised temperatures an uniformly as possible, that is, so that each semiconductor substrate substantially undergoes the same treatment, it is proposed on the one hand to vary the ratio of the volume limited by two consecutive armrests and on the other hand the volume limited by screening off the process area and the edge of the substrates from the insertion end of the gas to the discharge end of the gas that flows through the oven.
    Type: Grant
    Filed: July 7, 1999
    Date of Patent: June 5, 2001
    Assignee: ASM International N.V.
    Inventors: Margreet Obertine Anne-Marie Van Wijck, Rudi Wilhelm, Ernst Hendrik August Granneman
  • Patent number: 4065532
    Abstract: A process for admixing additives to plastics and simultaneously removing volatile constituents in a horizontal devolatilizing extruder. Taken in sequence in the direction of flow, the additives are first introduced into the devolatilizing extruder from above, and the plastic melt, solution or dispersion is then introduced from below, while the bulk of the volatile constituents are withdrawn from the devolatilizing extruder at an orifice located vertically above the point at which the plastic is fed in. The process permits the removal of volatile constituents with simultaneous admixture of additives during aftertreatment of plastics, in a single step and at very high throughputs.
    Type: Grant
    Filed: April 3, 1975
    Date of Patent: December 27, 1977
    Assignee: BASF Aktiengesellschaft
    Inventors: Hans Wild, Guenter Jeckel, Adolf Echte, Johann Zizlsperger, Rudi Wilhelm Reffert, Gunter Thielen
  • Patent number: 3954722
    Abstract: A continuous process for the polymerisation of olefinically unsaturated monomers in bulk or in solution in which at least a portion of the low-viscosity materials to be fed to the polymerization zone is thoroughly mixed with a portion of the high-viscosity contents of the polymerization zone in a mixing zone disposed upstream of the polymerization zone, which mixture is then continuously fed to the polymerization zone. The resulting polymers have a uniform composition and a narrow molecular weight distribution. They may be converted to shaped articles by thermoplastic methods.
    Type: Grant
    Filed: August 26, 1974
    Date of Patent: May 4, 1976
    Assignee: BASF Aktiengesellschaft
    Inventors: Adolf Echte, Johann Zizlsperger, Ernst Tetzlaff, Rudi Wilhelm Reffert