Patents by Inventor Rudiger J. Stroh

Rudiger J. Stroh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of optimizing a chip pattern on a semiconductor wafer
    Patent number: 5874189
    Abstract: A method is disclosed for optimizing a pattern of semiconductor chips, which includes a mask being aligned via a reference point on the mask and an alignment mark on the wafer. The relative spatial position of the alignment mark is determined by a procedure for optimizing quantities which determine the fabrication costs of a semiconductor chip, while the position of the semiconductor chips relative to each other remain fixed during the optimization.
    Type: Grant
    Filed: October 10, 1996
    Date of Patent: February 23, 1999
    Assignee: Deutche ITT Industries GmbH
    Inventors: Rudiger J. Stroh, Detlef Kunert