Abstract: A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge.

Abstract: A plasma X-ray tube with high electron current densities includes a plasma chamber formed of a metal hollow cathode having an outer limiting wall with an X-ray target and a mutually spaced apart and opposed inner limiting wall with at least one metal acceleration grid being highly transparent to electron and ion radiation and being in alignment with the X-ray target defining a path. At least one ignition electrode in the form of a thin wire protrudes into the plasma chamber at positive potential relative to the hollow cathode. At least one anode retained in an insulated and gas-tight manner in one of the side walls of the hollow cathode is disposed laterally of the alignment of the target and grid and at positive potential relative to the hollow cathode. An acceleration chamber adjoins and communicates with the plasma chamber through the acceleration grid. The acceleration chamber is surrounded by metal walls in electrical and gas-tight connection with the limiting walls of the hollow cathode.