Patents by Inventor Rudolf Lehner

Rudolf Lehner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11557505
    Abstract: A method for manufacturing a semiconductor device includes implanting gas ions in a donor wafer and bonding the donor wafer to a carrier wafer to form a compound wafer. The method also includes subjecting the compound wafer to a thermal treatment to cause separation along a delamination layer and growing an epitaxial layer on a portion of separated compound wafer to form a semiconductor device layer. The method further includes cutting the carrier wafer.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: January 17, 2023
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Lehnert, Rudolf Berger, Rudolf Lehner, Gerhard Metzger-Brueckl, Guenther Ruhl
  • Patent number: 10974365
    Abstract: A method for forming semiconductor devices includes: grinding a backside of a semiconductor wafer with a grinding wheel during a first time interval, wherein the grinding wheel is forward moved during the first time interval, wherein a plurality of semiconductor devices are formed on the semiconductor wafer; and polishing the backside of the semiconductor wafer with the grinding wheel in a second time interval, wherein the grinding wheel is backward moved during the second time interval.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: April 13, 2021
    Assignee: Infineon Technologies AG
    Inventor: Rudolf Lehner
  • Publication number: 20210013090
    Abstract: A method for manufacturing a semiconductor device includes implanting gas ions in a donor wafer and bonding the donor wafer to a carrier wafer to form a compound wafer. The method also includes subjecting the compound wafer to a thermal treatment to cause separation along a delamination layer and growing an epitaxial layer on a portion of separated compound wafer to form a semiconductor device layer. The method further includes cutting the carrier wafer.
    Type: Application
    Filed: September 22, 2020
    Publication date: January 14, 2021
    Inventors: Wolfgang Lehnert, Rudolf Berger, Rudolf Lehner, Gerhard Metzger-Brueckl, Guenther Ruhl
  • Publication number: 20200298369
    Abstract: A method for forming semiconductor devices includes: grinding a backside of a semiconductor wafer with a grinding wheel during a first time interval, wherein the grinding wheel is forward moved during the first time interval, wherein a plurality of semiconductor devices are formed on the semiconductor wafer; and polishing the backside of the semiconductor wafer with the grinding wheel in a second time interval, wherein the grinding wheel is backward moved during the second time interval.
    Type: Application
    Filed: June 10, 2020
    Publication date: September 24, 2020
    Inventor: Rudolf Lehner
  • Patent number: 10710210
    Abstract: A method for forming semiconductor devices includes: grinding a backside of a semiconductor wafer with a grinding wheel during a first time interval, wherein the grinding wheel is forward moved during the first time interval, wherein a plurality of semiconductor devices are formed on the semiconductor wafer; polishing the backside of the semiconductor wafer with the grinding wheel in a second time interval, wherein the grinding wheel is backward moved during the second time interval; and dicing the semiconductor wafer to separate the plurality of semiconductor devices from each other without additional polishing of the backside of the semiconductor wafer before dicing the semiconductor wafer.
    Type: Grant
    Filed: May 29, 2019
    Date of Patent: July 14, 2020
    Assignee: Infineon Technologies AG
    Inventor: Rudolf Lehner
  • Publication number: 20190275638
    Abstract: A method for forming semiconductor devices includes: grinding a backside of a semiconductor wafer with a grinding wheel during a first time interval, wherein the grinding wheel is forward moved during the first time interval, wherein a plurality of semiconductor devices are formed on the semiconductor wafer; polishing the backside of the semiconductor wafer with the grinding wheel in a second time interval, wherein the grinding wheel is backward moved during the second time interval; and dicing the semiconductor wafer to separate the plurality of semiconductor devices from each other without additional polishing of the backside of the semiconductor wafer before dicing the semiconductor wafer.
    Type: Application
    Filed: May 29, 2019
    Publication date: September 12, 2019
    Inventor: Rudolf Lehner
  • Patent number: 10307884
    Abstract: An apparatus for controlling a movement of a grinding wheel of a semiconductor wafer grinding system includes: an interface to obtain a feedback signal including grinding force information indicating a force applied to a semiconductor wafer by the grinding wheel; and a control module to generate a control signal for controlling the movement of the grinding wheel based on the grinding force information. The control module generates the control signal to trigger a forward movement of the grinding wheel according to a desired velocity profile during the grinding, if the grinding force information indicates that a force applied by the grinding wheel is below a force threshold. The control module generates the control signal to trigger a movement of the grinding wheel slower than the desired velocity profile during the grinding, if the grinding force information indicates that the force applied by the grinding wheel is above the force threshold.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: June 4, 2019
    Assignee: Infineon Technologies AG
    Inventor: Rudolf Lehner
  • Publication number: 20180047619
    Abstract: A method for manufacturing a semiconductor device includes providing a carrier wafer; and forming a semiconductor device layer on the carrier wafer. After front side processing of the semiconductor device layer, the carrier wafer is removed by cutting along a plane which is parallel to the semiconductor device layer.
    Type: Application
    Filed: July 25, 2017
    Publication date: February 15, 2018
    Inventors: Wolfgang Lehnert, Rudolf Berger, Rudolf Lehner, Gerhard Metzger-Brueckl, Guenther Ruhl
  • Publication number: 20180021919
    Abstract: An apparatus for controlling a movement of a grinding wheel of a semiconductor wafer grinding system includes: an interface to obtain a feedback signal including grinding force information indicating a force applied to a semiconductor wafer by the grinding wheel; and a control module to generate a control signal for controlling the movement of the grinding wheel based on the grinding force information. The control module generates the control signal to trigger a forward movement of the grinding wheel according to a desired velocity profile during the grinding, if the grinding force information indicates that a force applied by the grinding wheel is below a force threshold. The control module generates the control signal to trigger a movement of the grinding wheel slower than the desired velocity profile during the grinding, if the grinding force information indicates that the force applied by the grinding wheel is above the force threshold.
    Type: Application
    Filed: July 20, 2017
    Publication date: January 25, 2018
    Inventor: Rudolf Lehner
  • Patent number: 9536816
    Abstract: An electronic device comprising a carrier having a mounting surface, at least one electronic chip mounted on the mounting surface, at least one electric connection structure mounted on the mounting surface, an encapsulant at least partially encapsulating the carrier and the at least one electronic chip, and partially encapsulating the at least one electric connection structure so that part of a surface of the at least one electric connection structure is exposed to an environment, and a mounting provision configured for mounting the electronic device at a periphery device.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: January 3, 2017
    Assignee: Infineon Technologies AG
    Inventors: Angela Kessler, Eduard Knauer, Rudolf Lehner, Wolfgang Schober, Sigrid Schultes
  • Publication number: 20160035658
    Abstract: An electronic device comprising a carrier having a mounting surface, at least one electronic chip mounted on the mounting surface, at least one electric connection structure mounted on the mounting surface, an encapsulant at least partially encapsulating the carrier and the at least one electronic chip, and partially encapsulating the at least one electric connection structure so that part of a surface of the at least one electric connection structure is exposed to an environment, and a mounting provision configured for mounting the electronic device at a periphery device.
    Type: Application
    Filed: July 31, 2015
    Publication date: February 4, 2016
    Inventors: Angela KESSLER, Eduard KNAUER, Rudolf LEHNER, Wolfgang SCHOBER, Sigrid SCHULTES
  • Publication number: 20100237474
    Abstract: Unpolished semiconductor wafers are produced by: (a) pulling a single crystal of a semiconductor material, (b) grinding the single crystal round, (c) separating a semiconductor wafer from this crystal, (d) rounding the edge of the semiconductor wafer, (e) surface-grinding at least one side of the semiconductor wafer, (f) treating the semiconductor wafer with an etchant, and (g) cleaning the semiconductor wafer. The unpolished semiconductor wafers have, on at least the front side, a reflectivity of 95% or more, a surface roughness of 3 nm or less, have a thickness of 80-2500 ?m, an overall planarity value GBIR of 5 ?m or less with an edge exclusion of 3 mm and a photolithographic resolution of at least 0.8 ?m, and which furthermore contain a native oxide layer with a thickness of 0.5-3 nm on both sides.
    Type: Application
    Filed: June 1, 2010
    Publication date: September 23, 2010
    Applicant: SILTRONIC AG
    Inventors: Wolfgang Hensel, Rudolf Lehner, Helmut Schwenk
  • Patent number: 7754009
    Abstract: Unpolished semiconductor wafers are produced by: (a) pulling a single crystal of a semiconductor material, (b) grinding the single crystal round, (c) separating a semiconductor wafer from this crystal, (d) rounding the edge of the semiconductor wafer, (e) surface-grinding at least one side of the semiconductor wafer, (f) treating the semiconductor wafer with an etchant, and (g) cleaning the semiconductor wafer. The unpolished semiconductor wafers have, on at least the front side, a reflectivity of 95% or more, a surface roughness of 3 nm or less, have a thickness of 80-2500 ?m, an overall planarity value GBIR of 5 ?m or less with an edge exclusion of 3 mm and a photolithographic resolution of at least 0.8 ?m, and which furthermore contain a native oxide layer with a thickness of 0.5-3 nm on both sides.
    Type: Grant
    Filed: September 28, 2006
    Date of Patent: July 13, 2010
    Assignee: Siltronic AG
    Inventors: Wolfgang Hensel, Rudolf Lehner, Helmut Schwenk
  • Patent number: 7417198
    Abstract: The invention relates to a radiofrequency power semiconductor module having a cavity housing constructed from three modules, a 1st module, which has an upwardly and downwardly open housing frame with horizontally arranged flat conductors, a 2nd module, which has the chip island as a heat sink with at least one radiofrequency semiconductor component, the 2nd module forming the bottom of the cavity housing, and a 3rd module, which has the housing cover.
    Type: Grant
    Filed: May 22, 2003
    Date of Patent: August 26, 2008
    Assignee: Infineon Technologies AG
    Inventors: Bernd Betz, Jochen Dangelmaier, Rudolf Lehner, Stefan Paulus
  • Patent number: 7259088
    Abstract: An apparatus for singulating and bonding semiconductor chips includes a singulating station and a mounting station. In the singulating station, a semiconductor chip is provided with a bonding wire by a bonding tool and lifted off a carrier film. Then, in the mounting station, the semiconductor chip is placed on a chip mounting surface and fixed in place. The bonding wire is guided to a contact-connection surface of the circuit carrier and bonded to this surface.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: August 21, 2007
    Assignee: Infineon Technologies AG
    Inventor: Rudolf Lehner
  • Patent number: 7245026
    Abstract: A configuration and method for contacting a circuit is described. A carrier is disposed adjacent a circuit, and a setting element at which an electrical connection formed of a conductive material is disposed, so that the electrical connection connects the circuit to the carrier in a bonding process. In this manner an efficient and cost effective method for connecting the circuit to carrier is performed.
    Type: Grant
    Filed: June 17, 2002
    Date of Patent: July 17, 2007
    Assignee: Infineon Technologies AG
    Inventor: Rudolf Lehner
  • Publication number: 20070072423
    Abstract: Unpolished semiconductor wafers are produced by: (a) pulling a single crystal of a semiconductor material, (b) grinding the single crystal round, (c) separating a semiconductor wafer from this crystal, (d) rounding the edge of the semiconductor wafer, (e) surface-grinding at least one side of the semiconductor wafer, (f) treating the semiconductor wafer with an etchant, and (g) cleaning the semiconductor wafer. The unpolished semiconductor wafers have, on at least the front side, a reflectivity of 95% or more, a surface roughness of 3 nm or less, have a thickness of 80-2500 ?m, an overall planarity value GBIR of 5 ?m or less with an edge exclusion of 3 mm and a photolithographic resolution of at least 0.8 ?m, and which furthermore contain a native oxide layer with a thickness of 0.5-3 nm on both sides.
    Type: Application
    Filed: September 28, 2006
    Publication date: March 29, 2007
    Applicant: Siltronic AG
    Inventors: Wolfgang Hensel, Rudolf Lehner, Helmut Schwenk
  • Publication number: 20060065967
    Abstract: An apparatus for singulating and bonding semiconductor chips includes a singulating station and a mounting station. In the singulating station, a semiconductor chip is provided with a bonding wire by a bonding tool and lifted off a carrier film. Then, in the mounting station, the semiconductor chip is placed on a chip mounting surface and fixed in place. The bonding wire is guided to a contact-connection surface of the circuit carrier and bonded to this surface.
    Type: Application
    Filed: October 7, 2005
    Publication date: March 30, 2006
    Inventor: Rudolf Lehner
  • Publication number: 20060014326
    Abstract: A semiconductor component has a housing with a first main area and a second main area opposite to the first main area, which surrounds at least one semiconductor chip. The semiconductor chip has a first metallization layer on a first main side. A second main side of the semiconductor chip borders the second main area of the semiconductor component. The first metallization layer of the semiconductor chip is connected via electrical conductors to contacts that are likewise surrounded by the housing and border the second main area. The semiconductor chip furthermore has, on the second main side, a second metallization layer for carrying signals.
    Type: Application
    Filed: September 6, 2005
    Publication date: January 19, 2006
    Inventors: Albert Auburger, Hainz Oswald, Helga Hainz, Dietmar Lang, Rudolf Lehner, Stefan Paulus, Martin Petz, Michael Weber
  • Publication number: 20060012016
    Abstract: The invention relates to a radiofrequency power semiconductor module having a cavity housing constructed from three modules, a 1st module, which has an upwardly and downwardly open housing frame with horizontally arranged flat conductors, a 2nd module, which has the chip island as a heat sink with at least one radiofrequency semiconductor components, the 2nd module forming the bottom of the cavity housing, and a 3rd module, which has the housing cover.
    Type: Application
    Filed: May 22, 2003
    Publication date: January 19, 2006
    Inventors: Bernd Betz, Jochen Dangelmaier, Rudolf Lehner, Stefan Paulus