Abstract: A clean room system has at least one clean room through which clean air is guided. The clean room has a bottom through which the clean air exits. At least one blower for sucking the clean air from the clean room through the bottom is provided. The blower is in the form of an axial blower operating at low pressure. At least one inlet channel for introducing the clean air leaving the blower into the clean room is provided. Filter units are positioned at the ceiling of the clean room for filtering the clean air before entering the clean room.

Abstract: A cleaning device for a clean room has at least two filter-fan units each comprising a filter and a fan. Connecting elements connect the filter-fan units to one another to form a self-supporting construction unit. Each filter-fan unit comprises a housing having profiled elements for engaging the connecting elements in the form of bars or angled pieces. The connecting elements can be T-shaped or cross-shaped. The construction units can be supported on supports on the floor or suspended from the ceiling.

Abstract: The container and transfer process are intended to prevent stop contamination of semiconductor devices from occurring, even if the container is stored or handled under unclean room conditions. The semiconductor devices are subjected to an approximately laminar clean air stream passing around them in a clean air zone. A higher static pressure is maintained in the clean air zone than in the surrounding space which might be polluted with an inadmissibly high number of particles. The clean air stream carries along any dirt particles there may still be, so that they cannot settle on the semiconductor devices. Owing to the higher static pressure, a forced flow from the clean air zone of the higher static pressure outwards into the surrounding space is achieved, thus preventing an ingress of dirt particles from the surrounding space.

Abstract: A blade assembly normally driven by a power takeoff shaft has a frame normally displaced in a travel direction and provided with a pair of blade carriers horizontally reciprocal transverse to the direction. The drive unit comprises a right-angle transmission having a horizontal input connected to the power takeoff shaft and a vertical output, a vertical shaft offset from the output and having a pair of angularly offset eccentrics, and a belt drive interconnecting the transmission output and the vertical shaft. A pair of relatively long actuating arms extending in the direction flank the transmission and shaft and have rear ends pivoted on the frame and front ends connected to the respective blade carriers. A pair of respective connector plates extending transversely of the direction have respective inner ends carried on the eccentrics and outer ends connected to the arms between the ends thereof.