Patents by Inventor Rudolf Tannert

Rudolf Tannert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7167251
    Abstract: A method of processing an optical substrate having a convex surface comprises an interferometric measurement using a beam of diverging measuring light traversing the substrate and reflected from a concave mirror.
    Type: Grant
    Filed: September 21, 2005
    Date of Patent: January 23, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Wilhelm Ulrich, Bernd Doerband, Rudolf Tannert