Patents by Inventor Rudolf Voncken

Rudolf Voncken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070052945
    Abstract: A transparent pellicle member or plate (1) is mounted across a reticle, substantially parallel thereto, so as to define a gas-tight space (9) therebetween. The pellicle (1) is mounted on a frame (3) by flexible connection members (20) provided at opposing edges of the pellicle (1). The flexible connection members (20) may be in the form of a “bellows” type arrangement, to provide optimum flexibility in the direction perpendicular to the reticle, but significant resistance in all other directions. As a result, changes in gas pressure difference between the space (9) and the surrounding atmosphere supports the pellicle (1) using the weight of the pellicle itself. In other words, the pellicle (1) “floats” on the gas pressure difference, which pressure difference is maintained in a passive way, i.e. no electrical, pneumatic or other external connection is required.
    Type: Application
    Filed: September 16, 2004
    Publication date: March 8, 2007
    Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Marinus Antonius Loos, Rudolf Voncken
  • Publication number: 20070031736
    Abstract: A pellicle membrane (1) is connected to a frame (3), substantially parallel to a reticle base plate (5), so as to define an enclosure with a space (9) between the reticle carried on the base plate (5) and the pellicle membrane (1). A mask (6) is provided on the reticle within the enclosure. A bore hole (11) is provided in a side wall of the frame (3) into the enclosure. A mechanism (13) for adjusting the air pressure in the space (9) to compensate for the effect of gravity on the pellicle membrane (11), comprises a piston member (15) within a housing (17) which is closed at one end, so that a chamber (19) is defined at the closed end of the housing (17). A bore hole (21) is provided in a wall of the housing (17) into the chamber (19) and a tube or pipe (23) between the bore hole (11) and the bore hole (21) defines a gas path between the space (9) and the chamber (19).
    Type: Application
    Filed: September 2, 2004
    Publication date: February 8, 2007
    Applicant: KONINKLIJKE PHILLIPS ELECTRONICS N.V.
    Inventors: Marinus Antonius Loos, Rudolf Voncken
  • Publication number: 20060281014
    Abstract: A transparent pellicle member (1), comprising an inner or central portion (1A) and an out peripheral portion (1B) mounted across a reticle for use in semiconductor chip fabrication, substantially parallel thereto and with a space (9) therebetween. The central portion (1A) of the pellicle (1) is fixed with regard to position and tilt angle to the reticle base plate (5) by means of one or more anchors (50). The outer or peripheral portion (1B) of the pellicle (1) is separate from the central portion (IA). It is connected on each side to the central portion (1A) and to a frame (3) by means of flexible connectors (30), which are sufficiently flexible to permit movement of the peripheral portion (1B) of the pellicle membrane in a direction perpendicular to the reticle, but is sufficiently resistant to movement thereof in other directions.
    Type: Application
    Filed: September 15, 2004
    Publication date: December 14, 2006
    Inventors: Marinus Maria Loos, Rudolf Voncken