Patents by Inventor Rudolph Hendel

Rudolph Hendel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR USING SCANNING LIGHT BEAM FOR FILM OR SURFACE MODIFICATION
    Publication number: 20170060004
    Abstract: A method and apparatus for treating a substrate and, in particular, making secondary adjustments to the results of a primary process applied to the substrate, leading to improved uniformity of the overall process, in which a substrate is positioned on a substrate holder; a scanning a beam of light is directed onto the surface of the substrate; and the amplitude of the scanned beam is varied by location based on a substrate signature.
    Type: Application
    Filed: August 31, 2016
    Publication date: March 2, 2017
    Inventors: Rudolph Hendel, Mark Schattenburg, John Glenn