Patents by Inventor Rudy Pang

Rudy Pang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system
    Patent number: 11056315
    Abstract: An ionization chamber chip, a nano-aperture ion source, a proton beam writing system, and a method of fabricating an ionization chamber chip. The method comprises the step of providing a first substrate comprising a first depression formed in a back surface thereof; providing a backing element attached at the back surface of the first substrate such that a chamber is formed comprising at least the first depression; forming a gas inlet in the first substrate in fluid communication with the chamber; and forming a first aperture structure in the first substrate in fluid communication with the chamber.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: July 6, 2021
    Assignee: National University of Singapore
    Inventors: Jeroen Anton Van Kan, Xinxin Xu, Santhana Ramam Pattabiraman, Rudy Pang
  • AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD OF FABRICATION THEREOF, AND A PROTON BEAM WRITING SYSTEM
    Publication number: 20200211822
    Abstract: An ionization chamber chip, a nano-aperture ion source, a proton beam writing system, and a method of fabricating an ionization chamber chip. The method comprises the step of providing a first substrate comprising a first depression formed in a back surface thereof; providing a backing element attached at the back surface of the first substrate such that a chamber is formed comprising at least the first depression; forming a gas inlet in the first substrate in fluid communication with the chamber; and forming a first aperture structure in the first substrate in fluid communication with the chamber.
    Type: Application
    Filed: July 27, 2018
    Publication date: July 2, 2020
    Inventors: Jeroen Anton VAN KAN, Xinxin XU, Santhana Ramam Pattabiraman, Rudy Pang